标题：An overview on design of homebuilt micro-contact transfer printing machine with easy access to one micron patterning resolution
作者：Deng, Yongqiang ;Shang, Erwei ;Liu, Yu ;Gao, Weilian ;Chen, Yanqiu ;Bao, Chao ;Yan, Peng ;Jiang, Jin
作者机构：[Deng, Yongqiang ;Shang, Erwei ;Liu, Yu ;Gao, Weilian ;Chen, Yanqiu ] School of Mechnical Engineering, Jiangnan University, Wuxi; 214122, China;[Yan, 更多
会议名称：7th International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, IEEE 3M-NANO 2017
会议日期：August 7, 2017 - August 11, 2017
来源：Conference Program Digest - 7th International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, IEEE 3M-NANO 2017
摘要：A high-precision micro contact transfer printing machine, utilizing cantilever based force feedback control, is homebuilt for a general function in this work. It owns an agile access to control the contact force between the substrate and the printing stamp. The force is on-line processed by a micro controller unit carrying a P (proportional) - controller. The sample stage is installed on the horizontal axis so that the stamp could move from the ink position to the sample position. A real-Time image of the press-down progress is shown on the operation interface, running on a personal computer. The printer could be implemented in printing electronics. With the resolution of 0.01N, the force between the stamp and the sample could be loaded precisely and the whole transfer printing process is visible thus it provides a way to take the force under consideration while investigating the mechanism of the transfer printer. Final demonstration on printing of a metallic array with resolution down to 1 micron has been in success.
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