标题:Formation of optical barriers with excellent thermal stability in single-crystal sapphire by hydrogen ion implantation and thermal annealing
作者:William T. Spratt;Mengbing Huang;Chuanlei Jia;Lei Wang;Vimal K. Kamineni;Alain C. Diebold;Hua Xia
作者机构:College of Nanoscale Science and Engineering, University at Albany-SUNY, Albany, New York 12203, USA;College of Nanoscale Scienc
来源:Applied physics letters
出版年:2011
期:11
页码:111909-1-111909-3
摘要:We report a study on the use of hydrogen ion implantation to form optical barriers with excellent thermal stability in single-crystal sapphire. Sapphire crystals are implanted with H ions of energies 0.2-1 MeV to doses 10~(16)-10~(17) cm~(-2), followed by thermal annealing between 600-1200 deg C. Prism coupling experiments and spectroscopic ellipsometry indicate the formation of an optical barrier with decreased refractive index around the projected range of H ions in sapphire. The refractive index reduction is found to increase with annealing temperatures, reaching a maximum of approx3.2percent following annealing at 1200 deg C. The correlation of the structural properties with the formation of optical barriers and their thermal stability in sapphire crystals, is duscussed.
资源类型:期刊论文
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