标题：Mid-infrared ridge waveguide in MgO:LiNbO3crystal produced by combination of swift O5+ion irradiation and precise diamond blade dicing
作者：Cheng, Yazhou ;Lv, Jinman ;Akhmadaliev, Shavkat ;Zhou, Shengqiang ;Kong, Yongfa ;Chen, Feng
作者机构：[Cheng, Yazhou ;Lv, Jinman ;Chen, Feng ] School of Physics, State Key Laboratory of Crystal Materials, Key Laboratory of Particle Physics and Particle 更多
摘要：We report on the fabrication of ridge waveguide operating at mid-infrared wavelength in MgO:LiNbO3crystal by using O5+ion irradiation and precise diamond blade dicing. The waveguide shows good guiding properties at the wavelength of 4 μm along the TM polarization. Thermal annealing has been implemented to improve the waveguiding performances. The propagation loss of the ridge waveguide has been reduced to be 1.0 dB/cm at 4 μm after annealing at 310 °C. The micro-Raman spectra indicate that the microstructure of the MgO:LiNbO3crystal has no significant change along the ion track after swift O5+ion irradiation.
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