标题：Double barrier structures in LiNbO3 waveguide created by MeV He+ implantation
作者：Wang, KM; Lu, F; Meng, MQ; Li, W; Wang, X; Shi, BR; Zhou, Z; Gao, XY
作者机构：[Wang, KM; Lu, F; Meng, MQ; Li, W; Wang, X; Shi, BR; Zhou, Z; Gao, XY]SHANDONG NORMAL UNIV,DEPT PHYS,JINAN 250014,SHANDONG,PEOPLES R CHI 更多
通讯作者地址：[Wang, KM]SHANDONG UNIV,DEPT PHYS,JINAN 250100,SHANDONG,PEOPLES R CHINA.
摘要：The double barrier structures in a LiNbO3 waveguide have been investigated by 3.2 MeV He+ and 2.0 MeV He+ implantation to the dose of 3 x 10(16) ions/cm(2) and 1.5 x 10(16) ions/cm(2), respectively. The modes were measured using a prism (rutile) coupling method. The width of the modes is very irregular. The refractive index profile is analyzed based on the method by Fluck et al. [Appl. Phys. 74 (1993) 6023]. It is found that the measured mode indices of the waveguides are in agreement with the calculated mode indices. Also a damage study of double waveguides in LiNbO3 was performed by a Rutherford backscattering/channelling technique. The result shows that the channeling spectrum in the guiding region of the first waveguide is little different from that of virgin LiNbO3 crystal. (C) 1997 Elsevier Science B.V.