标题：Electrochemical Micromachining of Complex Shapes on Nickel and Nickel-Based Superalloys
作者：Huang, S. F.; Liu, Y.
作者机构：[Huang, S. F.] Anhui Univ Sci & Technol, Coll Mech Engn, Huainan, Peoples R China.; [Liu, Y.] Shandong Univ, Associated Engn Res Ctr Mech & Mechatro 更多
通讯作者地址：[Liu, Y]Shandong Univ, Associated Engn Res Ctr Mech & Mechatron Equipmen, Weihai 264209, Peoples R China.
来源：MATERIALS AND MANUFACTURING PROCESSES
关键词：Electrochemical; Pulse; Micro; High; Micromachining; System; Precision;; Nanosecond; Complex; Shapes
摘要：This paper proposes a high-precision electrochemical micromachining (EMM) system. By applying nanosecond pulses, workpiece dissolution can be restricted to a very small area around the microelectrode. First, an EMM system that meets the requirements of the EMM process is built. Second, sets of comparative experiments are performed on pure nickel and superalloy plates to study the effects of main machining parameters, e.g., pulse on time, applied voltage, pulse period, and electrode diameters, on side gap. Finally, after the preliminary experiments, complex microshapes with characteristic size of several tens of micrometers are successfully fabricated on the nickel and superalloy plates, thereby demonstrating that EMM is a very promising microfabrication technology.