标题：Holographic fabrication of photonic crystals by double-beam exposure method for improving the extraction efficiency of LED
作者：Wang, L.H. ;Yang, X.L. ;Meng, X.F. ;Wu, Y.Z. ;Yin, Z.M. ;Dong, G.Y.
通讯作者：Wang, L. H.
作者机构：[Wang, L.H. ;Yang, X.L. ;Meng, X.F. ] Department of Optics, Shandong University, Jinan, 250100, China;[Dong, G.Y. ] School of Science, Shandong Jianzh 更多
会议名称：2011 Symposium on Photonics and Optoelectronics, SOPO 2011
会议日期：16 May 2011 through 18 May 2011
来源：2011 Symposium on Photonics and Optoelectronics, SOPO 2011
关键词：Double-beam; Holographic lithography; LED; Photonic crystals
摘要：Light Emitting Diode (LED) has been developing rapidly in recent years because of its various characteristics, such as small size, long life, high brightness, low calorific power and so on. But the poor efficiency of light extraction is the major factor which constrains the development of LED. The two-dimensional (2D) photonic crystals (PhCs) are very suitable for improving the efficiency of light extraction. The PhCs whose size is centimeter level can be fabricated by holographic lithography. It is low cost and easier for the industrialization of production. To research the condition of making 2D PhCs for improving the efficiency of light extraction, we use 532nm laser as the light source and SU-8 negative photoresist as the mask. The 2D PhCs whose duty cycle is 1:1 are created by double-beam double exposure method. It is verified that the PhCs can be used to improve the efficiency of light extraction. ©2011 IEEE.