标题：Effect of piezoelectric layers on the size-dependent pull-in instability analysis of electrostatically actuated MEMS
作者：Wang, Bing-Lei ;Zhang, Long ;Xiao, Yue
作者机构：[Wang, Bing-Lei ;Zhang, Long ;Xiao, Yue ] Department of Engineering Mechanics, School of Civil Engineering, Shandong University, Jinan; 250061, China; 更多
会议名称：10th Symposium on Piezoelectricity, Acoustic Waves and Device Applications, SPAWDA 2015
会议日期：30 October 2015 through 2 November 2015
来源：Proceedings of the 2015 Symposium on Piezoelectricity, Acoustic Waves and Device Applications, SPAWDA 2015
关键词：Modified couple stress theory; Piezoelectric layer; Pull-in voltage; Size effect
摘要：With piezoelectric layers attached, the electrostatically actuated microbeam-based MEMS (Micro-Electro-Mechanical Systems) is modelled to study the pull-in instability based on a modified couple stress theory. The nonlinear differential governing equation and boundary conditions of the beam are derived by using Hamilton's principle. The results show that the piezoelectric layers can decrease the pull-in voltage by only applying very small voltage on the MEMS. The study may be helpful to characterize the mechanical and electrostatic properties of small size MEMS, or guide the design of microbeam-based devices for a wide range of potential applications. © 2015 IEEE.