标题：Cleaning technology of potassium dihydrogen phosphate crystal by a low-pressure jet
作者：Liu, Z. W.; Liu, R. Y.
作者机构：[Liu, Z. W.] Shandong Univ, Key Lab High Efficiency & Clean Mech Manufacture, Sch Mech Engn, Minist Educ,Ctr Adv Jet Engn Technol CaJET, Jinan 250061, 更多
通讯作者地址：[Liu, ZW]Shandong Univ, Key Lab High Efficiency & Clean Mech Manufacture, Sch Mech Engn, Minist Educ,Ctr Adv Jet Engn Technol CaJET, Jinan 250061, Peo 更多
来源：MATERIALS RESEARCH INNOVATIONS
关键词：KDP crystal; Residues; Cleaning technology; Liquid jet; Air jet
摘要：Potassium dihydrogen phosphate (KDP) crystal is widely used in the manufacture of electro-optic components. However, the residues such as polishing liquid, abrasives and chips on KDP crystal surface influence severely the surface quality. In this study, the low-pressure liquid jet and air jet are used to clean the residues on KDP crystal surface. The residue absorption mechanisms are studied. The polishing liquid is measured by the infrared spectrometer (VECTOR22) to be butoxydiglycol (C8H18O3). The cleaning solvents are determined based on the property of the polishing liquid. The cleaning system of low-pressure liquid jet and air jet is set up. Some cleaning experiments are carried out to testify the cleaning equipment. The results show that the 2D morphology that most particles are removed, and the 3D shape of the KDP crystal is improved greatly after cleaning. The cleaning technology is proved to be feasible for KDP crystal.