标题：The properties of planar Na:CBN waveguide with "well" plus "barrier" type by multiple energy helium ion implantation
作者：Zhao, Jin-Hua; Zhang, Han-Xu; Ye, Li -Li; Guo, Guang-Tong; Guan, Jing
作者机构：[Zhao, Jin-Hua; Zhang, Han-Xu; Ye, Li -Li; Guo, Guang-Tong] Shandong Jianzhu Univ, Sch Sci, Jinan 250101, Shandong, Peoples R China.; [Guan, Jing] S 更多
会议名称：19th International Conference on Radiation Effects in Insulators (REI)
会议日期：JUL 02-07, 2017
来源：NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
关键词：Ion implantation; Waveguide; Na:CBN
摘要：Sodium doped Calcium Barium Niobate (Na:CBN) is of potential use in integrated optical devices with high power laser operation because of its unique nonlinear optical properties and the high Curie temperature. In our work, we research the fabrication and properties of planar Na:CBN waveguide by multiple energy He ion implantation. The sample is implanted with (450 + 500 + 550) keV He ions at room temperature with fluence of (3 + 3 + 3) x 10(16) ions/cm(2). Prism-coupling and end-face coupling measurements are used to investigate the optical properties of ion-implanted Na:CBN crystal. SRIM and FD-BPM simulations have been used to study the damage formation and light propagation process on the Na:CBN waveguide. Micro-Raman imaging is a powerful nondestructive approach to examine lattice modification and local micro-structural change. We perform con focal micro-Raman measurement, which is used to provide the information about the crystal structure of Na:CBN crystal after multiple energy He ion implantation. This work could provide useful information for integrated optical device based on Na:CBN crystal.