标题：Modeling and Control of a Piezoelectric-actuated Nano-positioner: An Hierarchical Composite Anti-disturbance Control Approach
作者：Leng, Tongtong; Yan, Peng; Guo, Lei
作者机构：[Leng, Tongtong] Shandong Univ, Sch Mech Engn, Minist Educ, Key Lab High Efficiency & Clean Mech Manufacture, Jinan, Shandong, Peoples R China.; [Ya 更多
会议名称：11th World Congress on Intelligent Control and Automation
会议日期：JUN 29-JUL 04, 2014
来源：2014 11TH WORLD CONGRESS ON INTELLIGENT CONTROL AND AUTOMATION (WCICA)
关键词：Nano-positioner; Anti-disturbance control; Disturbance-observer-based; control; H-infinity control
摘要：This paper studies the anti-disturbance control for ultra-high precision positioning of a piezoelectric-actuator driven nano-positioner, subjects to nonlinear dynamics and various external disturbances. In this particular study, the multiple-disturbance is supposed to have two parts. One is the undesired vibration resonance, which could be described by an exogenous dynamical system. The other includes model uncertainties and external random disturbances, which can be considered to have bounded norms. The physical model of the nano-positioning stage is discussed and a composite control law is then presented, where disturbance-observer-based control (DOBC) is formulated for feedforward compensation of the vibrations. Then a composite controller consisting of DOBC and an H-infinity controller is developed to achieve the anti-disturbance performance. Finally, simulations and experiments on the nano-stage are deployed to demonstrate the anti-disturbance performance by combining DOBC with H-infinity control.