标题：Free vibration analysis of bilayered circular micro-plate including surface effects
作者：Zhou, Shasha; Zhang, Rongmin; Zhou, Shenjie; Li, Anqing
作者机构：[Zhou, Shasha; Zhang, Rongmin; Li, Anqing] Qilu Univ Technol, Shandong Acad Sci, Sch Mech & Automot Engn, Daxue Rd 3501, Jinan 250353, Shandong, Peopl 更多
通讯作者：Zhang, Rongmin;Zhang, RM
通讯作者地址：[Zhang, RM]Qilu Univ Technol, Shandong Acad Sci, Sch Mech & Automot Engn, Daxue Rd 3501, Jinan 250353, Shandong, Peoples R China.
来源：APPLIED MATHEMATICAL MODELLING
关键词：Bilayered micro-plate; Surface effects; Free vibration analysis
摘要：Based on the Kirchhoff plate theory and the continuum surface elasticity theory, a novel model of bilayered circular micro-plates including surface effects is developed. Furthermore, the governing equation is derived, and the Galerkin method is employed to obtain approximate results. The influence of surface effects on the natural frequency of bilayered circular micro-plate is investigated. Besides, the effect of residual stresses on the transition behavior of the bilayered circular micro-plate from plate to membrane is predicted. The results are compared with the single-layer model and the modified laminated plate model. It is found that the natural frequency predicted by the present model is obviously different from that of the existing models. For different thickness ratios, the natural frequency obtained by the new model will be larger or smaller than the results of the single-layer model. The transition region from plate to membrane is expanded for stiffened surface and reduced for softened surface. The results of the novel model can provide effective guidance for the design of bilayered circular micro-plate in MEMS devices. (C) 2019 Elsevier Inc. All rights reserved.