标题：DAMAGE DISTRIBUTIONS IN LINBO3 CRYSTAL-INDUCED BY MEV F+ TILTED IMPLANTATIONS
作者：WANG, ZL; SHI, BR; WANG, KM; XU, TB; ZHU, PR
作者机构：[WANG, ZL; SHI, BR; WANG, KM; XU, TB; ZHU, PR]BEIJING UNIV,INST MICROELECTR,BEIJING 100871,PEOPLES R CHINA.;[WANG, ZL; SHI, BR; WANG, KM; 更多
会议名称：15th International Conference on Atomic Collisions in Solids (ICACS-15)
会议日期：JUL 26-30, 1993
来源：NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
摘要：X-cut LiNbO3 crystals have been implanted by 0.8, 1.0 and 1.2 MeV F+ tilted at angles of 15-degrees, 45-degrees and 60-degrees with doses of 5 x 10(14), 7 x 10(14) and 5 x 10(14) ions/cm2, respectively. The Rutherford backscattering (RBS)/channeling technique was used to investigate the induced damage distributions. The damage profiles were deconvoluted from the measured spectra after considering the energy spread due to the different stopping power of channeled and nonchanneled ions. Good agreements were obtained between the measured damage profiles and the calculated defect profiles by TRIM'90 (transport of ions in matter, version 1990), except that the measured damage concentration was enhanced in the near-surface region. Information on the lateral and longitudinal damage spread in LiNbO3 crystals was obtained from the damage profiles induced by tilted ion implantations and compared with TRIM'90 calculation.