标题:The recovery of glow-plasma structure in atmospheric radio frequency microplasmas at very small gaps
作者:Zhang, Yuan-Tao; Shang, Wan-Li
通讯作者:Zhang, YT
作者机构:[Zhang, Yuan-Tao] Shandong Univ, Sch Elect Engn, Shandong Prov Key Lab UHV Technol & Gas Discharge, Jinan 250061, Shandong, Peoples R China.; [Shang 更多
来源:PHYSICS OF PLASMAS
出版年:2011
卷:18
期:11
DOI:10.1063/1.3660677
关键词:glow discharges; high-frequency discharges; plasma density; plasma; sheaths; plasma transport processes; plasma-wall interactions
摘要:In atmospheric radio frequency discharges at 13.56 MHz, with the electrode gap reduced, the sheath region eventually occupies a main portion of the electrode spacing and the bulk plasma region is significantly compressed. The computational results in this letter based on a one-dimensional fluid model show that by increasing the excitation frequency over 13.56 MHz, the traditional glow-plasma structure could gradually recover even at very small sizes with a well defined quasineutral plasma region, and the electron density is improved but the electric fields in sheath region are reduced. This study indicates that the excitation frequency can be used to modulate the discharge structure and then tailor the plasma-surface interaction in atmospheric microplasmas. (C) 2011 American Institute of Physics. [doi:10.1063/1.3660677]
收录类别:EI;SCOPUS;SCIE
WOS核心被引频次:12
Scopus被引频次:16
资源类型:会议论文;期刊论文
原文链接:https://www.scopus.com/inward/record.uri?eid=2-s2.0-82555182662&doi=10.1063%2f1.3660677&partnerID=40&md5=50a12cfcf2918c54cdba7e76c31ec301
TOP