标题：H-infinity Control for Ptezo-Actuated Nanopositioning Stages with Time Delays
作者：Zhang, Zhiming; Yan, Peng
作者机构：[Zhang, Zhiming; Yan, Peng] Shandong Univ, Sch Mech Engn, Control Engn & Precis Mechatron Lab, Jinan, Shandong, Peoples R China.
会议名称：2017 7th International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
会议日期：AUG 07-11, 2017
来源：2017 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO)
关键词：H-infinity;optimization;nanopositioning; thnedelays; robust control
摘要：Many piezo-driven nanopositioning systems employ ultra high resolution capacitive sensors for displacement feedback, which results in significant time delays induced by AD conversion. The infinite dimensionality of such systems poses new challenges for nanopositioning control, where traditional control methods can not be applied directly. In this paper, a model with time delay on a nanopositioning stage is discussed, and a parameter identification method is further deployed using experiments to determine the time delay and other model parameters, A robust H-infinity control design approach is also developed by using Pads expansion to approximate the time delay block. Real time experiments with the proposed control design are conducted on a piezo-actuated nanopositioning stage, where high precision motions, robustness against model uncertainties, as well as hysteresis compensation capability, are demonstrated, which significantly outperforms traditional PI control approach.