标题：Study of the effect of H implantation and annealing on LiTaO3surface blistering
作者：Ma, Changdong ;Lu, Fei ;Ma, Yujie
作者机构：[Ma, Changdong ;Lu, Fei ;Ma, Yujie ] School of Information Science and Engineering, Shandong University, Jinan; Shandong; 250100, China
来源：Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
摘要：LiTaO3samples are implanted by 120 keV hydrogen ion with different fluences at room temperature. H+concentration and distribution is detected using Elastic recoil detection. Experimental results show that the threshold fluence for blistering in LiTaO3surface is 6 × 1016ion/cm2. Surface blistering phenomenon is studied by using optical microscopy, Rutherford back scattering spectrometry, transmission electron microscopy and atomic force microscopy. Bubble growing and surface blister's dependence on annealing process is observed and analyzed. The critical internal pressure and stress of surface blistering in H+-implanted LiTaO3is derived based on theoretical model and experimental results. Gibbs free energy and cavity critical radius are introduced to explain the blister shrink and rupture observed in the experiment.
© 2014 Elsevier B.V.